Effects of Nitrogen on Crystal Growth of Sputter-Deposited ZnO Films for Transparent Conducting Oxide
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概要
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We have studied the effects of the N<inf>2</inf>gas flow rate on the surface morphology of ZnO films deposited by the sputtering of a ZnO target using Ar/N<inf>2</inf>. Height-height correlation function (HHCF) analysis indicates that introducing a small amount of N<inf>2</inf>({<}5 sccm) to the sputtering atmosphere enhances adatom migration, leading to a larger grain size in the ZnO films associated with an increase in the lateral correlation length. The HHCF analysis also reveals that films deposited with and without N<inf>2</inf>exhibit a self-affine fractal surface structure. We demonstrate that utilizing such ZnO films deposited using Ar/N<inf>2</inf>as buffer layers, the crystallinity of ZnO:Al (AZO) films on the buffer layers can be greatly improved. The electrical resistivity of 100-nm-thick AZO films decreases from 1.8\times 10^{-3} to 4.0\times 10^{-4} \Omega\cdotcm by utilizing a ZnO buffer layers prepared at N<inf>2</inf>flow rate of 5 sccm.
- 2013-11-25
著者
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Uchida Giichiro
Graduate School Of Advanced Sciences Of Matter Hiroshima University
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Shiratani Masaharu
Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka 819-0395, Japan
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Itagaki Naho
Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka 819-0395, Japan
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Kuwahara Kazunari
Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka 819-0395, Japan
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Yamashita Daisuke
Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka 819-0395, Japan
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Suhariadi Iping
Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka 819-0395, Japan
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Oshikawa Kouichiro
Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka 819-0395, Japan
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Matsushima Kouichi
Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka 819-0395, Japan
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Koga Kazunari
Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka 819-0395, Japan
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