Development of a Multi-Scale Electromigration Simulator Based on a Combination of Ultra Accelerated Quantum Chemical Molecular Dynamics and Kinetic Monte Carlo Methods Application to Cu Interconnects Lifetime Simulation
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概要
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We present a novel study on electromigration (EM) phenomena in Cu interconnects using a newly developed multi-scale simulator that consists on a combination of a device scale simulator based on a kinetic Monte Carlo (KMC) method and an atomic scale simulator based on ultra accelerated quantum chemical molecular dynamics (UA-QCMD). We have firstly demonstrated the simulation of the lifetime of Cu interconnects using the newly developed device scale simulator setting some suitable KMC probabilities for the void movement according to the regions in which it can be divided, i.e., the crystal grain and the grain boundary. The simulated values are shown to be in good agreement with experimental values. In an attempt to connect the device scale studies to quantum chemical instances of the system — since the correlation of probability of the void movement with, for example, activation energies or diffusion coefficients is important — we have developed an atomic scale simulator based on our original UA-QCMD method. In this atomic scale simulation, the electron wind force was evaluated using our original electrical conductivity prediction simulator based on KMC method which uses the electronic states from tight-binding quantum chemical (TBQC) calculation. Using this atomic scale simulator under the conditions of 475 K of temperature and $2.5 \times 10^{10}$ A/m2 of current density, we were able to successfully simulate the migration of a Cu atom from a lattice site to a vacant site by evaluating the electron wind force.
- 2009-04-25
著者
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Sahnoun Riadh
Department Of Applied Chemistry Graduate School Of Engineering Tohoku University
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Del Carpio
Department Of Applied Chemistry Graduate School Of Engineering Tohoku University
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Kubo Momoji
Fracture and Reliability Research Institute, Graduate School of Engineering, Tohoku University
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Lv Chen
Department Of Applied Chemistry Graduate School Of Engineering Tohoku University
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Suzuki Ai
New Ind. Creation Hatchery Center Tohoku Univ.
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Takaba Hiromitsu
Department Of Applied Chemistry Graduate School Of Engineering Tohoku University
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Sato Hiromi
Department Of Geriatric Pharmacology And Therapeutics Graduate School Of Pharmaceutical Sciences Chi
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Tsuboi Hideyuki
Department Of Applied Chemistry Graduate School Of Engineering Tohoku University
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Miyamoto Akira
Department Of Applied Chemistry Graduate School Of Engineering Tohoku University
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Endou Akira
Department Of Applied Chemistry Graduate School Of Engineering Tohoku University
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Miura Ryuji
Department Of Cardiovascular Medicine Okayama University
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Koyama Michihisa
Department Of Applied Chemistry Graduate School Of Engineering Tohoku University
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Hatakeyama Nozomu
Department Of Applied Chemistry Graduate School Of Engineering Tohoku University
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SETOGAWA Hiroshi
Department of Applied Chemistry, Graduate School of Engineering, Tohoku University
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Deka Ramesh
Department of Chemical Science, School of Science and Technology, Tezpur University, Napaam 784028, Tezpur, Assam, India
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Kato Asami
Department of Applied Chemistry, Graduate School of Engineering, Tohoku University, 6-6-11-1302 Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Hasekura Fumie
Department of Applied Chemistry, Graduate School of Engineering, Tohoku University, 6-6-11-1302 Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Oda Saori
Department of Applied Chemistry, Graduate School of Engineering, Tohoku University, 6-6-11-1302 Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Abe Chie
Department of Applied Chemistry, Graduate School of Engineering, Tohoku University, 6-6-11-1302 Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Chutia Arnubhiram
Department of Applied Chemistry, Graduate School of Engineering, Tohoku University, 6-6-11-1302 Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Zhu Zigang
Department of Applied Chemistry, Graduate School of Engineering, Tohoku University, 6-6-11-1302 Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Miura Ryuji
Department of Applied Chemistry, Graduate School of Engineering, Tohoku University, 6-6-11-1302 Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Sato Hiromi
Department of Applied Chemistry, Graduate School of Engineering, Tohoku University, 6-6-11-1302 Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Suzuki Ai
New Industry Creation Hatchery Center, Tohoku University, 6-6-10 Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Koyama Michihisa
Department of Chemical Engineering, Graduate School of Engineering, Tohoku University, 6-6-11-1302 Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Sahnoun Riadh
Department of Chemical Engineering, Graduate School of Engineering, Tohoku University, 6-6-11-1302 Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Setogawa Hiroshi
Department of Applied Chemistry, Graduate School of Engineering, Tohoku University, 6-6-11-1302 Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Lv Chen
Department of Applied Chemistry, Graduate School of Engineering, Tohoku University, 6-6-11-1302 Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Kubo Momoji
Fracture and Reliability Research Institute, Graduate School of Engineering, Tohoku University, 6-6-11-701 Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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