Single Phase Drive Ultrasonic Motor Using LiNbO3 Rectangular Vibrator
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概要
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A miniature thin-plate ultrasonic motor fabricated from LiNbO3 was studied. To obtain a single phase drive motor, we used a coupling mode which combined a longitudinal and flexural in-plane vibrations. In our previous study, the coupling modes were achieved in a parallelogram vibrator by the effect of additional external mass. Instead of deforming the outer shape, this study uses an internal coupling effect resulting from the crystal anisotropy. We confirmed that a rectangular plate vibrator made of $X$-rotated $Y$-cut LiNbO3 with additional $y^{\prime}$-axis rotation has coupling modes and can operate as the stator of a single phase motor. In this paper, we describe the design of the vibrator with finite element method analysis and the experimental results from the ultrasonic motor using a LiNbO3 rectangular plate 10 mm in length. The motor with a rotor shaft 1 mm in diameter demonstrated the following characteristics: a speed of 1000 rpm and torque of 25 μN m in counter-clockwise (CCW) revolution, and of 5000 rpm and 12 μN m in clockwise (CW) revolution. We obtained the reverse rotation experimentally; however, the different characteristics between CW and CCW operation, which are obstacle to practical use, are subjects for future study.
- 2008-05-25
著者
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TOMIKAWA Yoshiro
Graduate Program of Human Sensing and Functional Sensor Engineering Yamagata University
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TAKANO Takehiro
Information and Communication Engineering, Tohoku Institute of Technology
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Tamura Hideki
Graduate Program Of Human Sensing And Functional Sensor Engineering Yamagata University
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Hirose Seiji
Graduate School of Science and Engineering, Yamagata University, Yonezawa, Yamagata 992-8510, Japan
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Tomikawa Yoshiro
Graduate School of Science and Engineering, Yamagata University, Yonezawa, Yamagata 992-8510, Japan
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Aoyagi Manabu
Muroran Inst. of Tech.
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Shibata Kyousuke
Graduate School of Science and Engineering, Yamagata University, Yonezawa, Yamagata 992-8510, Japan
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Takano Takehiro
Information and Communication Engineering, Tohoku Institute of Technology, Sendai 982-8577, Japan
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