Software-Controlled Measurement System for Large Vibrational Amplitude Piezoelectric Resonator Using Continuous Driving Method with Numerical Equivalent Model

概要

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We developed a measurement system to characterize piezoelectric resonators under high-power condition using the continuous driving method. This method needs resonance frequency tracking over many hours so that the resonant characteristics are measured in a steady state of heat generation of the resonator. Additionally, while measuring the resonant characteristics by sweeping the driving frequency, the vibration displacement amplitude must be constant to avoid a nonlinear effect, especially jump phenomena. This measurement system adopts a motional electric current to control the target instead of direct mechanical vibration to stabilize the measurement over many hours. The motional current is not easily influenced by mechanical disturbance, but is equal to mechanical vibration, and it is operated with a numerical equivalent model in this software-based system instead of the differential circuit of the traditional method. In this study, we attempted expansion of the equivalent model from the conventional $C_{\text{d}}$-cancel model, and attempted control using the motional electric charge, which is equivalent to mechanical displacement. Additionally, we compared the measurement results of a sample resonator with the simple input current constant method and with the motional charge constant method.
2011-07-25