Characteristics of 10 mm Multilayer L1-F2 Mode Vibrator and Application to a Linear Motor
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概要
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In the present paper we discuss a small-sized multilayer L1-F2 mode vibrator and its application to an ultrasonic linear motor. In an attempt to reduce both the size and the driving voltage of an L1-F2 mode vibrator, we constructed a multilayer L1-F2 mode vibrator whose inner electrodes are simply divided into two. Test results clarified that the multilayer L1-F2 mode vibrator exhibits two resonance modes; namely, a first longitudinal mode and a second flexural mode, and that an amplitude of vibration velocity is sufficiently large for application to a linear motor. Specific merits of our multilayer L1-F2 mode vibrator are that the driving voltage is low (5 Vrms), owing to multilayer construction, and that the vibrator is small ($10 \times 2.5 \times 2$ mm: W$\times$H$\times$D), owing to the simple construction of the inner electrodes. Additionally, the present study revealed that an ultrasonic linear motor using the multilayer L1-F2 mode vibrator exhibits superior performance in practical application.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-05-15
著者
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TOMIKAWA Yoshiro
Graduate Program of Human Sensing and Functional Sensor Engineering Yamagata University
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Funakubo Tomoki
Integrated Precision Technology Department Olympus Optical Co. Ltd.
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Tomikawa Yoshiro
Graduate Program of Systems and Information Engineering, Group of Electro-Mechanical Engineering, Yamagata University, Yonezawa, Yamagata 992-8510, Japan
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Funakubo Tomoki
Integrated Precision Technology Department, Olympus Optical Co., Ltd., Hachioji, Tokyo 192-8512, Japan
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