Ultrasonic Linear Motor with Two Independent Vibrations

概要

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We propose a new structure of an ultrasonic linear motor in order to solve the problems of high-power ultrasonic linear motors that drive the $XY$-stage for electron beam equipment and to expand the application fields of the motor. We pay special attention to the following three points: (1) the vibration in two directions of the ultrasonic linear motor should not influence mutually each other, (2) the vibration in two directions should be divided into the stage traveling direction and the pressing direction of the ultrasonic linear motor, and (3) the rigidity of the stage traveling direction of the ultrasonic linear motor should be increased. As a result, the supporting method of ultrasonic linear motors is simplified. The efficiency of the motor is improved and temperature rise is reduced. The stage position drift is also improved.
2004-09-15