Structural and Optical Properties of AlInN Films Grown on Sapphire Substrates
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概要
- 論文の詳細を見る
We report the structural and optical properties of AlInN films grown on (0001) sapphire substrates by reactive radio-frequency (rf) magnetron sputtering using aluminum and indium targets in an ambient of argon and nitrogen. X-ray diffraction analysis and atomic force microscopy show that AlInN films with a smooth surface can be obtained and that the lattice constant for the $c$-axis obtained from the (0002) diffraction peak of the AlInN films decreases with an increase in the Al composition $x$. Optical transmittance and reflectance spectra analysis reveals that the AlInN films are of a direct bandgap structure as AlN and InN. The bandgap energy of the AlInN films can be tailored by varying the ratio of the rf power of the indium target to that of the aluminium target.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2008-01-25
著者
-
Ogawa Hiroshi
Department Of Anatomy And Neurobiology Kyoto Prefectural University Of Medicine
-
Tanaka Tooru
Department Of Biotechnology Faculty Of Engineering Kansai University
-
Nishio Mitsuhiro
Department Of Electrical And Electronic Engineering Faculty Of Science And Engineering Saga Universi
-
Guo Qixin
Department Of Electrical And Electronic Engineering Faculty Of Science And Engineering Saga Universi
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Guo Qixin
Department of Electrical and Electronic Engineering, Saga University, Saga 840-8502, Japan
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