Growth Properties of Poly(tetrafluoroethylene) Films by Synchrotron Radiation Ablation
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概要
- 論文の詳細を見る
High-quality poly(tetrafluoroethylene) (PTFE) films have been grown on Si substrates by synchrotron radiation ablation of a PTFE target. Only doublet absorption structures assigned to C–F asymmetric and symmetric stretching vibrations in CF2 groups are observed, suggesting that the CF2 groups in the grown PTFE film are organized in an ordered manner through linear attachment. The growth rate of the PTFE films increases with increasing target temperature, while it decreases with increasing substrate temperature. It has been shown that the thickness of the PTFE film with a high-spatial-resolution structure can be easily controlled at nanometer order by changing the synchrotron radiation irradiation dose.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-10-15
著者
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Ogawa Hiroshi
Department Of Anatomy And Neurobiology Kyoto Prefectural University Of Medicine
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Tanaka Tooru
Department Of Biotechnology Faculty Of Engineering Kansai University
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Nishio Mitsuhiro
Department Of Electrical And Electronic Engineering Faculty Of Science And Engineering Saga Universi
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Guo Qixin
Department Of Electrical And Electronic Engineering Faculty Of Science And Engineering Saga Universi
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Kume Yusuke
Department Of Electrical And Electronic Engineering Faculty Of Science And Engineering Saga Universi
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Guo Qixin
Department of Electrical and Electronic Engineering, Saga University, Saga 840-8502, Japan
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Nishio Mitsuhiro
Department of Electrical and Electronic Engineering, Saga University, Saga 840-8502, Japan
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Kume Yusuke
Department of Electrical and Electronic Engineering, Saga University, Saga 840-8502, Japan
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Kugino Takashi
Department of Electrical and Electronic Engineering, Saga University, Saga 840-8502, Japan
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Mitsuishi Yoshiaki
Department of Electrical and Electronic Engineering, Saga University, Saga 840-8502, Japan
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Tanaka Tooru
Department of Electrical and Electronic Engineering, Saga University, Saga 840-8502, Japan
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