Development of (Pb,La)(Zr,Ti)O3 Electro-Optic Thin Film for High-Speed Spatial Light Modulator

概要

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A high-speed electro-optic spatial light modulator (EOSLM) was successfully fabricated with (Pb,La)(Zr,Ti)O3 (PLZT) electro-optic thin film. This EOSLM has a longitudinal structure, so a large electro-optic effect is necessary for low driving voltage (${<}20$ V). We have investigated the relationship between the orientation of polycrystalline PLZT and the electro-optic effect; we found that (111)-orientated PLZT has a large electro-optic effect, which shows a more than 0.025 refractive index change and a 183 pm/V electro-optic constant. With this PLZT film, we fabricated a prototype spatial light modulator (SLM) chip, which has $180\times 180$ pixel arrays. The measured optical switching speed of this device was 7 ns, which is the highest switching speed for two-dimensional pixel array devices. Coded random data is clearly demonstrated with the prototype chip.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2006-09-30