Polarization and Leakage Degradation of Pt/SrBi2Ta2O9/Pt Capacitors and Their Recovery
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概要
- 論文の詳細を見る
Water (H2O) vapor-induced degradation of SrBi2Ta2O9 (SBT) capacitors has been investigated. SBT capacitors with no passivation layer were maintained in the atmosphere at 20°C for one-half year after their preparation. The capacitors showed pronounced degradation of polarization and increased leakage currents. A recovery process based on H2O vaporization from the SBT films was examined. We succeeded in completely recovering the polarization, fatigue and leakage current characteristics using thermal annealing at 300°C in a vacuum.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-09-15
著者
-
Maeda Yoshihito
Department Of Electronic Engineering University Of Surrey
-
Kobayashi Hiroyuki
Department Of Anesthesiology Okayama Red Cross Hospital
-
Kobayashi Hiroyuki
Department of Energy Science and Technology, Kyoto University, Sakyo-ku, Kyoto 606-8501, Japan
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Tamai Shinichi
Department of Energy Science and Technology, Kyoto University, Sakyo-ku, Kyoto 606-8501, Japan
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Tamai Shin-ichi
Department of Energy Science and Technology, Kyoto University, Sakyo-ku, Kyoto 606-8501, Japan
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