Modeling and Initial Growth Mode of Ultrathin Film on the basis of Electrical Conductivity of Substrate
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概要
- 論文の詳細を見る
A model for the electrical conductance of a semiconductive substrate with an average thickness is proposed for a region of initial growth before the appearance of a tunneling effect. Based on this model, we propose 6 different growth modes according to the film thickness, measuring in situ electrical conductivity. As the film thickness increased, the island size was constant and then increased, while the number of islands first increased and then decreased. The proposed model may be useful for in situ study of the growth of ultrathin films prior to the onset of tunneling conductance.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-09-15
著者
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SONG Seok-Kyun
UION Corporation
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Lee Deuk
Department Of Dermatology Asan Medical Center University Of Ulsan College Of Medicine
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Baik Hong-koo
Department Of Metallurgical Engineering College Of Engineering Yonsei University
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Song Kie
Department Of Applied Physics Konkuk University
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Lee Deuk
Department of Metallurgical System Engineering, Yonsei University, Sudaemoon Ku, Shincheon Dong 134, Seoul 120-749, Korea
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Baik Hong-Koo
Department of Metallurgical System Engineering, Yonsei University, Sudaemoon Ku, Shincheon Dong 134, Seoul 120-749, Korea
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Song Kie
Department of Applied Physics, Konkuk University, 322 Danwol-dong, Chungju-si, Chungcheongbuk-do 380-701, Korea
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Song Seok-Kyun
UION Corporation, 5-3 Mullaedong 5-ga, Yeongdeungpo-gu, Seoul 150-095, Korea
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Koh Seok-Keun
Thin Film Research Center, Korea Institute of Science and Technology, Cheongryang P.O. Box 131, Seoul 130-650, Korea
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