Fabrication of Zn-Indiffused LiNbO3 Optical Waveguides by Diffusing Sol–Gel Spin-Coated ZnO Film at Low-Pressure Atmosphere
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概要
- 論文の詳細を見る
Planar and channel waveguides supporting both extraordinary and ordinary polarization modes were fabricated by diffusing sol–gel spin-coated ZnO film into Z-cut congruent LiNbO3 at low-pressure atmosphere. The waveguide showing propagation losses of $0.2 \pm 0.1$ dB/cm for extraordinary and $0.7 \pm 0.2$ dB/cm for ordinary polarization modes at 1.5 μm wavelength was fabricated by diffusing 330 nm ZnO film at 890°C for 4 h in a low-pressure of 1 Torr. The effect of spin-coated ZnO film thickness and diffusion conditions on the waveguiding properties are discussed.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-08-15
著者
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FUJIMURA Masatoshi
Department of Biochemical Science and Technology, Faculty of Agriculture, Kagoshima University
-
Senthil Selvan
Department Of Electronic Engineering Graduate School Of Engineering Osaka University
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Suhara Toshiaki
Department Of Elect Ronics Graduate School Of Engineering Osaka University
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Fujimura Masatoshi
Department of Electronic Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamada-Oka, Suita, Osaka 565-0871, Japan
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