Fabrication of LiNbO_3 TE/IM Waveguides for 1.5 μm Wavelength Band by Zn/Ni Diffusion in Low-Pressure Atmosphere
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概要
- 論文の詳細を見る
Zn-diffused waveguides can support both ordinary and extraordinary polarization modes and are expected to have high resistance to photorefractive damages. In this paper, fabrication of Zn:LiNbO_3 channel waveguides for 1.5 μm wavelength band by diffusing metallic Zn in low-pressure atmosphere is reported. The waveguides were fabricated under various conditions. It was found that pressure control during diffusion is crucial to obtain smooth diffused surface and to suppress Li_2O out-diffusion. Single-mode TE/TM waveguides with 〜1 dB/cm propagation were obtained. The process is simple and has good reproducibility.
- 社団法人応用物理学会の論文
- 2002-07-30
著者
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FUJIMURA Masatoshi
Department of Biochemical Science and Technology, Faculty of Agriculture, Kagoshima University
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Suhara Toshiaki
Department Of Elect Ronics Graduate School Of Engineering Osaka University
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Fujimura Masatoshi
Department Of Elect Ronics Graduate School Of Engineering Osaka University
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SHIGEMATSU Yasuaki
Department of Elect ronics, Graduate School of Engineering, Osaka University
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Shigematsu Yasuaki
Department Of Elect Ronics Graduate School Of Engineering Osaka University
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