Fabrication of Zn-Indiffused LiNbO3 Optical Waveguides Using ZnS as Diffusion Source
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概要
- 論文の詳細を見る
Fabrication of Zn-indiffused LiNbO3 waveguides using ZnS as a diffusion source is proposed and demonstrated for the first time. Possibility of Zn diffusion into Z-cut LiNbO3 using ZnS was examined. The diffusion in low-pressure atmosphere produced Zn-diffused crystals with a smooth surface. Single-mode waveguiding for transverse magnetic (TM) and transverse electric (TE) modes was achieved at 1.5 μm wavelength in the channel waveguides fabricated by the diffusion of ZnS film at 890°C for 30 min in oxygen at 1 Torr pressure.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2005-05-15
著者
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FUJIMURA Masatoshi
Department of Biochemical Science and Technology, Faculty of Agriculture, Kagoshima University
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Senthil Selvan
Department Of Electronic Engineering Graduate School Of Engineering Osaka University
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Suhara Toshiaki
Department Of Elect Ronics Graduate School Of Engineering Osaka University
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Suhara Toshiaki
Department of Electronic Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamada-Oka, Suita, Osaka 565-0871, Japan
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