Atomic Level Analysis of Carbon and Silicon by a Scanning Atom Probe
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概要
- 論文の詳細を見る
Carbon nanotubes, chemical vapor deposition (CVD) diamond, high-temperature-high-pressure (HPHT) diamond, vitreous carbon, graphite and silicon are analyzed by a scanning atom probe (SAP). All specimens contain a large amount of hydrogen. The CVD diamond grown in hydrogen exhibits the highest hydrogen concentration with a ratio of hydrogen to carbon atoms (H/C) of 2.02, and vitreous carbon has the lowest hydrogen concentration with a H/C ratio of 0.25. Significant difference is noticed in the hydrogen desorption energy among analyzed CNTs. The [111]-oriented silicon wafers are chemically etched by HF and NH4F. Although a few analyzed areas are hydrogen-covered and stay clean even when exposed to air, most areas are contaminated with hydrogen, oxygen and carbon. The carbon concentration in the HF-treated silicon is found to be slightly higher than that in the NH4F-treated silicon. An unexpected finding is the shift of the most abundant Si-H clusters from Si4H+ to Si2H+ with the depth of the analyzed area of the NH4F-treated silicon.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-07-15
著者
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Watanabe Masafumi
Department Of Cardiovascular Medicine Graduate School Of Medicine The University Of Tokyo
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Taniguchi Masahiro
Department Of Bioapplied Chemistry Faculty Of Engineering Osaka City University
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Kuzumaki Toru
Department Of Materials Sci. Graduate School Of Engineering The University Of Tokyo
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Kondo Shoko
Surface Science Division Toray Research Center
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Murakami Tomo
Department Of Materials Science And Engineering Kanazawa Institute Of Technology
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Nishikawa Osamu
Department of Materials Science and Engineering, Kanazawa Institute of Technology, Ohgigaoka 7-1, Nonoichi, Ishikawa 921-8501, Japan
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Nishikawa Osamu
Department of Biology and Chemistry, Kanazawa Institute of Technology, 7-1 Ohgigaoka, Nonoichi, Ishikawa 921-8501, Japan
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Kondo Shoko
Surface Science Division, Toray Research Center, 3-3-7 Sonoyama, Ohtsu 520-8567, Japan
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Taniguchi Masahiro
Department of Materials Science and Engineering, Kanazawa Institute of Technology, Ohgigaoka 7-1, Nonoichi, Ishikawa 921-8501, Japan
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Murakami Tomo
Department of Materials Science and Engineering, Kanazawa Institute of Technology, Ohgigaoka 7-1, Nonoichi, Ishikawa 921-8501, Japan
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Watanabe Masafumi
Department of Materials Science and Engineering, Kanazawa Institute of Technology, Ohgigaoka 7-1, Nonoichi, Ishikawa 921-8501, Japan
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NISHIKAWA Osamu
Department of Anatomy II, School of Veterinary Medicine, Azabu University
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