An Airlock for a Resistively Heatable Specimen of a Field Ion Microscope and an Atom-Probe
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概要
- 論文の詳細を見る
An airlock assembly, which enables the specimen of a field ion microscope and an atom-probe to be heated resistively, is described. The typical pressure rise during specimen change is 10^<-5> Pa. Shortly after this specimen change a vacuum of 10^<-7> Pa is recovered and a new specimen can be examined in less than one hour.
- 社団法人応用物理学会の論文
- 1982-07-20
著者
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NISHIKAWA Osamu
Department of Materials Science and Engineering, The Graduate School at Nagatsuta, Tokyo Institute o
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Horie Shiro
Department Of Materials Science And Engineering The Graduate School At Nagatsuta Tokyo Institute Of
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Nishikawa Osamu
Department Of Earth Sciences Faculty Of Science Kanazawa University
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Nishikawa Osamu
Department Of Materials Science And Engineering The Graduate School At Nagatsuta Tokyo Institute Of
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Nishikawa Osamu
Department of Biology and Chemistry, Kanazawa Institute of Technology, 7-1 Ohgigaoka, Nonoichi, Ishikawa 921-8501, Japan
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NISHIKAWA Osamu
Department of Anatomy II, School of Veterinary Medicine, Azabu University
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