Fabrication and Characterization of AlGaAs-based Photonic Crystal Slab Waveguides by Precisely Controlled Self-Aligned Selective-Oxidation Process
スポンサーリンク
概要
- 論文の詳細を見る
The oxidation process applied to the fabrication of an oxide-cladding two-dimensional AlGaAs-based photonic crystal waveguide with tapered ridge waveguides is thoroughly investigated. Combining an extremely small amount of oxidation with the tapered ridge waveguides yielded the self-aligned selective oxidation without any masking layers. This tapered ridge waveguide with partial oxidation functions like a spot size converter that reduces propagation loss and, more importantly, lessens the significant strain induced by oxidation. On the other hand, satisfactory agreement between transmission measurements of fabricated samples and three-dimensional finite-difference time-domain calculations demonstrates the high quality of the photonic crystal slab waveguide.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-12-15
著者
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Inoue Kuon
Chitose Institute Of Science And Technology
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Yang Tao
The Femtosecond Technology Research Association
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ASAKAWA Kiyoshi
The Femtosecond Technology Research Association (FESTA)
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TANAKA Yu
The Femtosecond Technology Research Association
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SUGIMOTO Yoshimasa
The Femtosecond Technology Research Association
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IKEDA Naoki
The Femtosecond Technology Research Association
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MARUYAMA Taishi
Chitose Institute of Science and Technology
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MIYASHITA Kazuya
Chitose Institute of Science and Technology
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ISHIDA Koji
Chitose Institute of Science and Technology
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Watanabe Yoshinori
National Institute Of Advanced Industrial Science And Technology (aist)
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Ikeda Naoki
The Femtosecond Technology Research Association, Tsukuba 300-2635, Japan
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Miyashita Kazuya
Chitose Institute of Science and Technology, Chitose 066-8655, Japan
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Sugimoto Yoshimasa
The Femtosecond Technology Research Association, Tsukuba 300-2635, Japan
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Maruyama Taishi
Chitose Institute of Science and Technology, Chitose 066-8655, Japan
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Watanabe Yoshinori
National Institute of Advanced Industrial Science and Technology, Tsukuba 305-0046, Japan
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Asakawa Kiyoshi
The Femtosecond Technology Research Association, Tsukuba 300-2635, Japan
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Yang Tao
The Femtosecond Technology Research Association, Tsukuba 300-2635, Japan
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Tanaka Yu
The Femtosecond Technology Research Association, Tsukuba 300-2635, Japan
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Ishida Koji
Chitose Institute of Science and Technology, Chitose 066-8655, Japan
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