InAs-Dot/GaAs Structures Site-Controlled by in situ Electron-Beam Lithography and Self-Organizing Molecular Beam Epitaxy Growth
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概要
- 論文の詳細を見る
A novel site-control technique for InAs dot fabrication on GaAs has been demonstrated by a combination of in situ electron-beam (EB) lithography and self-organizing molecular beam epitaxy (MBE) using an ultrahigh-vacuum multichamber system. On an MBE-grown GaAs (001) surface, shallow holes of submicron size were patterned by in situ EB writing and Cl_2 gas etching. By supplying more than 1.4 monolayer of InAs onto the patterned surface, In(Ga)As dots were preferentially self-organized in the holes, while dot formation around the holes was sufficiently suppressed, due to the selectivity of In atom incorporation in the (111)B-like slope in the hole. This indicates the usefulness of such a technique in fabricating arbitrarily arranged quantum-dot structures.
- 社団法人応用物理学会の論文
- 1999-02-28
著者
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Ishikawa Tomonori
The Femtosecond Technology Research Association (festa)
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ASAKAWA Kiyoshi
The Femtosecond Technology Research Association (FESTA)
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Kohmoto Shigeru
The Femtosecond Technology Research Association (festa)
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- Fabrication and Characterization of AlGaAs-based Photonic Crystal Slab Waveguides by Precisely Controlled Self-Aligned Selective-Oxidation Process
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- Wavelength-Dependent Coupling Characteristics in Two-Dimensional Photonic-Crystal Slab Directional Coupler
- Two-Dimensional InGaAs Quantum-Dot Arrays with Periods of 70-100nm on Artificially Prepared Nanoholes
- InAs-Dot/GaAs Structures Site-Controlled by in situ Electron-Beam Lithography and Self-Organizing Molecular Beam Epitaxy Growth
- Control of InAs Quantum Dot Emission Wavelengths in Narrow Regions by Selective Formation of GaInAs Covered Layers Grown with in situ Mask
- Two-Dimensional InGaAs Quantum-Dot Arrays with Periods of 70–100 nm on Artificially Prepared Nanoholes
- Ultra-Small Photonic-Crystal-Waveguide-Based Y-Splitters Useful in the Near-Infrared Wavelength Region
- Fabrication and Characterization of AlGaAs-based Photonic Crystal Slab Waveguides by Precisely Controlled Self-Aligned Selective-Oxidation Process
- Ultra-Small GaAs-Photonic-Crystal-Slab-Waveguide-Based Near-Infrared Components: Fabrication, Guided-Mode Identification, and Estimation of Low-Loss and Broad-Band-Width in Straight-Waveguides, 60°-Bends and Y-Splitters
- InAs Nano-Dot Array Formation Using Nano-Jet Probe for Photonics Applications