Preparation of Lead Titanate Thin Films Using Langmuir-Blodgett Method
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概要
- 論文の詳細を見る
The Langmuir-Blodgett (LB) method is investigated as a process in thefabrication of ferroelectric thin films such as lead titanate. LB film was fabricated bydepositing a monolayer prepared by stearic acid (C17H35COOH), lead chlorides (PbCl2)and titanium bis(ammonium lactato)([CH3CH(O–)CO2NH4]2Ti(OH)2). As a conversionprocess from the LB film containing lead and titanium to an inorganic film, ultraviolet/ozone (UVO) treatment was found to be extremely applicable at a rate of about 4 min per monolayer. Subsequent rapid thermal annealing (RTA) resulted in a dense oxidethin film. The thickness of an oxide thin film converted from the LB film consisting of301 layers was approximately 30 nm. Hence, it is considered that approximately 0.1 nmof the oxide layer is equivalent to the thickness of the film deposited by each cycle.From an X-ray diffraction pattern of the oxide specimen, a well-defined perovskitepeak structure was observed. These results demonstrate the potential application of LBdeposition for the preparation of an inorganic oxide film such as lead titanate.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1998-09-30
著者
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Hoshi Nobuo
Research Institute For Electric And Magnetic Materials
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Iijima Takashi
Tohoku National Industrial Research Institute
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Masumoto Hiroshi
Institut Fur Physiologische Chemie I Heinrich-heine-universitat Dusseldorf
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Hoshi Nobuo
Research Institute for Electric and Magnetic Materials, 2-1-1 Yagiyama-minami, Taihaku-ku, Sendai, Miyagi 982-0807, Japan
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Sugai Hirosbi
Research Institute for Electric and Magnetic Materials, 2-1-1 Yagiyama-minami, Taihaku-ku, Sendai, Miyagi 982-0807, Japan
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Masumoto Hiroshi
Institute for Materials Research, Tohoku University, 2-2-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, Japan
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