真空中のレーザアブレーションにより生成されたカーボンプラズマプルームの計測

概要

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A carbon plasma plume was produced in a vacuum by ablating a graphite target using KrF excimer laser, Nd:YAG laser second harmonic and fundamental light. Emission spectroscopy, two-dimensional laser induced fluorescence (2D-LIF), spectral absorption and ion probe diagnostics measurements were used to measure C atoms, C+ ions, C2 and C3 molecules in the carbon plasma plume versus laser wavelength and laser fluence. The 2D-LIF images examined the temporal and spatial profiles of C2 and C3 near the target surface. It was found that the KrF laser of 248 nm ablated species of carbon atoms and ions with highly excited electronic states from the target, and C2 and C3 were also found near the target. Nd:YAG laser light of 532 nm more effectively produced C, C+ than the fundamental Nd:YAG laser light of 1064 nm. The carbon species produced by the Nd:YAG laser of 1064 nm were thought to result from the thermal evaporation of the target by laser heating.
2003-02-01