J054054 インフライトプラズマCVDによるシリコン量子ドット合成([J05405]マイクロ・ナノスケールの熱流体現象(5))

概要

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A non-thermal very-high-frequency plasma is used to synthesize luminescent silicon nanocrystals from silicon tetrachloride. The average nanocrystal diameter can be varied between 3 to 12 nm with narrow size distributions and the size can be adjusted independently of the relative hydrogen and argon concentrations in the plasma. The photoluminescence of oxidized nanocrystals can also be varied from 650 nm to 900 nm. The surface of the nanocrystals is terminated with hydrogen and chlorine. The nanocrystals oxidize at significantly faster rates than purely hydrogen terminated nanocrystals, but slower than fluorine terminated nanocrystals indicating the electronegativity of surface terminating atoms strongly influence the oxidation process.
一般社団法人日本機械学会の論文
2011-09-11