MP-38 細胞の力学パラメータ連続計測のためのオンチッププローブの非接触精密駆動(ポスターセッション)

概要

論文の詳細を見る
In the previous study, we actuated magnetically driven micro-tools (MMT) by an external magnetic field of permanent magnet placed in the outside of microchip. In this mechanism, we succeeded in MMT positioning with 1μm order resolution. However, since the MMT is driven by magnet on the motorized stage, the positioning accuracy of MMT is difficult to be improved. To obtain nanometric order resolution, we proposed the reduction mechanism. The features of this mechanism are shown as follows. 1.Accurate positioning with high resolution, 2.Parallel plate mechanisms for stable operation and 3.Reduction rate depends on only the rate of stiffness. We succeeded in nanometric order non-contact actuation of on-chip probe by using reduction mechanism.
一般社団法人日本機械学会の論文
2011-09-25