MNM-2A-3 レーザー誘起誘電泳動を用いた拡散係数モニタリングのための集積化マイクロチップの開発(セッション 2A MEMSデバイスを用いた熱・流体計測,マイクロ・ナノ工学における非線形力学,電気等価回路から考えるMEMS設計手法)

概要

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We have newly developed an integrated micro chip for diffusion coefficient monitoring by using a laser induced dielectrophoresis, which enables small sample volume and high-speed measurement of bio samples such as protein. In our method, a sinusoidal concentration distribution is generated by a laser-induced dielectrophoresis (DEP), and by observing the mass diffusion of the concentration distribution, the diffusion coefficient can be obtained. In order to generate the sinusoidal concentration distribution in a micro channel of a dielectrophoretic cell, a micro Fresnel mirror (MFM) device has been proposed. MFM consists of two cantilever type mirrors that are slanted in an appropriate angle by torsion springs and stiction anchors. This paper reports the fabrication process of MFM and the validity of the proposed device both analytically and experimentally.
2010-10-12