T0501-4-3 近接場光学熱脱離を用いた自己組織化単分子膜のナノスケールパターニング法の開発([T0501-4]マイクロ・ナノスケールの熱流体現象(4))

概要

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We have proposed a novel patterning method of self-assembled monolayer (SAM) using near-field photothermal desorption (NPTD). This paper reports the patterning principle and the validity of the proposed method both experimentally and theoretically. The method utilizes the thermal desorption of the constituent molecules of SAM and near-field light, which can make noncontact and noncontaminated patterning of SAM in nanoscale. In order to verify the validity of the patterning of SAM using thermal desorption, the patterning of SAM by irradiating the laser beam was carried out. The result suggested that the constituent molecules were thermally desorbed. Next, analytical simulation of the temperature distribution using the finite element method was demonstrated. The result showed that the sample surface was locally heated in nanoscale by irradiating the near-field light generated by using the fiber probe coated with silver. As a result, the validity of the nanoscale patterning of SAM using NPTD was verified.
一般社団法人日本機械学会の論文
2010-09-04