偏光した近接場光を用いたナノスケール温度測定手法の開発(<小特集>第1回マイクロ・ナノ工学シンポジウム)

概要

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Measurement of temperature distribution at nanometer scale is important for the thermal design of high integrated devices. However, in conventional optical measurement techniques, the spatial resolution is limited by the diffraction limit of light, which is approximately half of the wavelength of the optical beam. Therefore, we have developed a novel optical temperature measurement method in nanometer scale using near-field microscope technique. We newly employed the polarization of light into the measurement principle, since the near-field polarization has a high sensitivity for the refraction index of the sample, which varies with temperature. In this method, the near-field optical fiber probe which can maintain the polarization state is necessary for increasing the measurement sensitivity. Hence, we have newly fabricated the single mode near-field optical fiber probe. In this paper, we report the verification of the new measurement principle and the comparison of the measurement sensitivity with the results using temperature dependence of reflectance.
2010-08-25