2A2-L10 レーザ駆動Robot-on-a-chipに関する研究 : その3: テザード型マイクロツールの設計と製作

概要

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In this paper, we fabricated a tethered microtool and a microheater by using the metal material and manipulated the tethered microtool by optical tweezers. Conventional microtools are made of polymer materials. Although polymer microtool has good characteristics such as transparency, mass productivity by photolithography, application of the microtool was limited such as mechanical manipulations of small object and local measurement using indicators. This metal microtool was designed to tethered shape to be fixed to the substrate, and has high heat transfer and high electrical conductivity to achieve various functions such as local temperature stimulus, local electrical stimulus and mechanical stimulus. However, the metal microtool cannot be manipulated by optical tweezers directly since metal is non-transparent. We employed the gel-microtool to manipulate the metal microtool indirectly by adhering the gel-microtool to the metal microtool. We analyzed and fabricated the microheater. We demonstrated the manipulation of the metal microtool with the gel-microtool by optical tweezers.
一般社団法人日本機械学会の論文
2009-05-25