2A1-F05 光造形マルチモールディングの研究 : (第1報)サブミクロンスラリーを用いたシリカ立体構造の作製(MEMSとナノテクノロジー)

概要

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Three-dimensional (3-D) molding processes based on microstereolithography was proposed and developed. To make 3-D ceramic microstructures, a 3-D mold made from a photopolymer, which is covered with ceramic slurry, is thermally decomposed. In our method, high concentration slurry (67.9vol.%) containing submicron SiO2 particles is used for making high-density (99.7%) SiO_2 Glass. Pyrolysis process of the photopolymer was examined by TG-DTA measurement. The heating condition is optimized by using master decomposition curve theory. The optimal pyrolysis process made it possible to make 3-D ceramic microstructures such as a rotor model and a fullerene model. The further optimization of the pyrolysis process is needed for making crack-free ceramic 3-D microstructures with high fidelity.
一般社団法人日本機械学会の論文
2008-06-06