3323 光造形モールディングによるシリカ微小立体構造の作製(S44 マイクロ・スケール・デジタル・エンジニアリング,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

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Three-dimensional (3-D) molding processes based on microstereolithography was proposed and developed. To make 3-D ceramic microstructures, a 3-D mold made from a photopolymer, which is covered with ceramic slurry, is thermally decomposed. In our method, high concentration slurry (67.9vol.%) containing submicron SiO_2 particles is used for making high-density (99.7%) SiO_2 Glass. Pyrolysis process of the photopolymer was examined by TG-DTA measurement. The heating condition is optimized by using master decomposition curve theory. The optimal pyrolysis process made it possible to make 3-D ceramic microstructures such as a rotor model and a fullerene model. The further optimization of the pyrolysis process is needed for making crack-free ceramic 3-D microstructures with high fidelity.
2008-08-02