2A1-F06 光造形マルチモールディングの研究 : (第2報)メンブレンアシスト法による多様な立体構造の複製(MEMSとナノテクノロジー)

概要

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A replication technique of three-dimensional (3-D) microstructures produced by two-photon microstereolithography have been developed. In this technique, 3-D master model produced by two-photon microstereolithography is replicated using a PDMS mold. By adding thin membranes to a master model with closed loops, complex 3-D microstructures including as a table model and a spiral model can be reproduced. In addition, to replicate microstructures less than 10 micrometers, supercritical drying process was introduced. Since the surface tension while drying the microstructures can be removed, fragile 3-D master models with thin membranes were successfully fabricated. The membrane-assisted 3-D soft-molding technique enables to reproduce even freely movable microstructures. This 3-D microtransfer molding technique will be applied to mass production of micromachines for biochip technology.
一般社団法人日本機械学会の論文
2008-06-06