1A2-H13 エバネッセント波駆動型マイクロモータの開発 : 階段状ブレードによる駆動効率の向上(MEMSとナノテクノロジー)

概要

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In this study, we have developed evanescent-wave-driven micromotors by two-photon microstereolithography. The evanescent-wave-driven micromotor is located on the surface of a high-refractive index substrate attached on a prism. By illuminating a laser beam at an angle greater than the critical angle, evanescent waves are generated under the micromotor. When the laser beam is scattered by the blades of the micromotor, the motor is affected with radiation pressure. As a result, the micromotor can be rotated by evanescent waves. We designed a novel micromotor with grating-like blades by electromagnetic field simulation. In our simulation, the optical torque exerted on the blade is 5 times larger than that of the previous rectangular blade. In addition, we demonstrated that the micromotor with grating-like blades could be rotated 2.5 times faster than the previous micromotor. The evanescent wave micromotors will be applied to optically driven lab-on-a-chip devices.
一般社団法人日本機械学会の論文
2011-05-26