C16 超微細塑性加工によるサブμmレベルのドットマトリックスの作成(OS-12 ナノ加工と表面機能(4))

概要

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A dot array structure of sub micro meter size is fabricated by combination of nano plastic forming (NPF), spatter coating and polishing processes. Firstly, formability of a soda glass by NPF using a nano structured diamond tool is studied. New step feed method is examined to improve the transcription ratio. Results showed the transcription ratio is significantly improved, and uniform array structure of submicron hole is fabricated by NPF. Secondly, a glass plate on which array of submicron hole is fabricated is subjected to spatter coating to fill the holes with gold. Then, extreme gold layer on the glass plate is removed by polishing., and an matrix array of submicron gold dots is fabricated. Through these experimental work, the feasibility of NPF for fabrication of submicron dot structure is confirmed.
社団法人日本機械学会の論文
2008-11-21