Efficient Fabrication of Ordered Metal Nanodot Array Using Nanoimprint Method with a TiN Thin-Film Mold and Annealing Method

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A new efficient fabrication method for an ordered metal nanodot array is developed by coupling nanoimprint method with a TiN thin-film mold and self-assembly of a metal thin-film due to thermal annealing. In this study, in order to develop a thin-film mold which possesses sufficient hardness and durability to use in the nanoimprint, we fabricate a TiN thin-film mold by the nano plastic forming, sputtering and electroplating processes. Using the fabrication method, TiN thin-film molds with different nanoscale surface structures can be developed. Furthermore, we demonstrate that the lattice- and parallel-patterned grooves can be formed on a gold thin-film by the nanoimprint with the developed TiN thin-film molds. It is found that a well-ordered gold nanodot array can be efficiently fabricated on a quartz glass substrate by annealing the gold thin-film formed by the nanoimprint.