J111031 微細塑性加工による規則的ナノドットアレイ形成のMulti-Phase-Fieldシミュレーション([J11103]マイクロナノ理工学:nmからmmまでの表面制御とその応用(3))

概要

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Recently, metal nano-dots array with unique electro and optical properties due to the localized surface Plasmon resonance have been used for various electromagnetic and biomedical devices. In order to improve their performance, it is essential to develop a new efficient fabrication method and to control morphology of the nano-dots array. In this study, the multi-phase-field simulation model is constructed to simulate formation of gold nano-dots array by our efficient fabrication method with the nano plastic forming (NPF) and annealing of gold thin-film. By the simulation method, we investigate effects of the grooves formed by the NPF and its pitch on the morphology of the gold nano-dots array.
一般社団法人日本機械学会の論文
2011-09-11