411 集束イオンビーム加工によるナノパターンの創製とその応用(T03-3 マイクロナノ理工学:nmからmmまでのテクスチャリングの創成と機能(3),大会テーマセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

論文の詳細を見る
This paper describes the fabrication methods nano-scale patterns and their applications in tribology studies. Focused ion beam (FIB) was used to create two types of asperity patterns. One is the periodic asperity array. The other is the single asperity. In each pattern, the asperity has a hemispherical peak. Three kinds of experiments were carried out using the nano-patterns. First, the pull-off force measured on each asperity pattern was proportional to the curvature radius of asperity peak. Second, a periodic asperity array was used calibrate the output from lateral force microscopy. Image calculated from topography data corresponded well with the lateral force image due to torsion of the cantilever. Finally, periodic asperity pattern was used to form a flat part on the cantilever probe by friction-induced wear.
2008-08-02