ナノメートルスケールの表面形状と摩擦力・引き離し力の関係

概要

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The friction and pull-ff forces were measured between an atomic force microscope (AFM) probe made of Si_3N_4 and submicron-size asperity arrays on a single crystal tungsten plate, a silicon wafer, and a platinum film. A focused ion beam was used to produce two-dimensional asperity arrays. The tip of the AFM probe had a flat, square surface measuring 0.7×0.7 μm^2. The pull-off force was proportional to the curvature radius of asperity peak, but was not affected by microroughness on the Peak. The friction force was proportional to Pull-off force. These suggest that Laplace pressure of condensed water was predominant as the pull off force and the Pull-off (adhesion) force worked as an extemal normal load for the friction. The friction coefficients calculated by regarding the pull-off force as the external normal load were compared between the platinum and silicon patterns, which proved that the friction coefficient on silicon was about twice higher than platinum.
一般社団法人日本機械学会の論文
1999-09-25