403 Si表面における微小形状の摩擦特性への影響(T03-1 マイクロナノ理工学:nmからmmまでのテクスチャリングの創成と機能(1),大会テーマセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

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The tribological properties of the textured surfaces have been investigated and it has been shown that the feature of surface can affect friction behavior of lubricated surface. In this study, the micro-textured surfaces with dimple, grating and bump was prepared by photorisography and wet and dry etching on Si surface in order to investigate the effect of the surface texture on the tribological properties in lubrication condition. The friction test was carried out using pin-on-plate tribometer. The commercial lubricants and the pins of cast iron were used. The results showed that the textured surface with dimple showed lower friction coefficients than the flat and other textured surfaces and that the deeper textured surface led the lower friction coefficients.
社団法人日本機械学会の論文
2008-08-02