4H-SiC Avalanche Photodiodes for 280nm UV Detection
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概要
- 論文の詳細を見る
We designed and fabricated 4H-SiC PIN avalanche photodiodes (APD) for UV detection. The thickness of an intrinsic layer in a PIN structure was optimized in order to achieve the highest quantum efficiency at the wavelength of interest. The optimized 4H-SiC PIN APDs exhibited a maximum external quantum efficiency of >80% at the wavelength of 280nm and a gain greater than 40000. Both electrical and optical characteristics of the fabricated APDs were in agreement with those predicted from simulation.
- 社団法人電子情報通信学会の論文
- 2009-06-17
著者
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Cha Ho-Young
School of Electronic and Electrical Engineering, Hongik University
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CHO Chun-Hyung
Department of Electronic & Electrical Engineering, Hongik University
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Cha Ho‐young
Hongik Univ. Seoul Kor
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Cha Ho-young
School Of Electrical And Computer Engineering Cornell University
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Cho Chun‐hyung
Hongik Univ. Chung‐nam Kor
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Park B.-R.
School of Electronic and Electrical Engineering, Hongik University
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Sung H.-K.
School of Electronic and Electrical Engineering, Hongik University
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Sandvik P.
GE Global Research Center
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Sung H.-k.
School Of Electronic And Electrical Engineering Hongik University
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Sandvik P.
Ge Global Research Center Niskayana
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Park B.-r.
School Of Electronic And Electrical Engineering Hongik University
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Cho Chun-Hyung
Department of Electrical Engineering, 200 Broun Hall, Auburn University, Auburn, AL 36849, U.S.A.
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