1011 メタンガスを用いたプラズマイオン注入によるDLC膜の深さ方向分析(表面改質による機械の高性能化)

概要

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Carbon-ion was implanted into tool steels by means of a plasma immersion ion-implantation technique. Various implantation conditions were used in order to investigate relation between mechanical properties and depth distribution of carbon in steel surface. The implanted surface was characterized by X-ray diffractmeter (XRD) for identification of in-situ synthesized carbide. Auger electron spectroscopy (AES) was used to determine the depth profile of the implanted species. Raman spectroscopy was utilized for the implanted surface. Substrate temperature was estimated from the hardness of tool steel substrate treated at simultaneously. Short term implantation with 20 kV of negative bias caused high concentration of carbon at the steel surface. After that, carbon film was deposited on the carbon enriched surface. Raman spectrum for the deposited carbon film showed that for a typical DLC film.
2007-09-28