2408 ガスバリア膜の被覆によるステンレス鋼の高温酸化特性の改善(S09-2 新表面改質技術と界面,環境,S09 表面改質)

概要

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Stainless steel is widely used as a corrosion-resistant material. However, stainless steel corrodes at high temperature (573K〜) due to the oxidization and grain boundary corrosion. To delay the oxidation at high temperature, coating of gas barrier film will be useful method. The purpose of this study is to improve the corrosion-resistant of SUS304 at high temperature by coating transparent SiO_xN_y film which has gas barrier properties. In addition, the influence of inlet nitrogen mass flow rate ratio (N_2/Ar+N_2) on the oxidation properties at 773K and on the state of a chemical bond were examined. The SiO_xN_y films were deposited onto polished SUS304 by unbalanced dc magnetron sputtering apparatus. To examine the oxygen transmission rate (OTR) of SiO_xN_y films, PET was also used as substrate. The results showed that good OTR was obtained for N_2/Ar+N_2<0.10 on PET substrate. The similar tendency was obtained for SUS304 deposited film heated up to 773K.
一般社団法人日本機械学会の論文
2007-09-07