2410 CrN薄膜/アルミニウム基板界面の性状に及ぼすイオンボンバード処理の影響(S09-2 新表面改質技術と界面,環境,S09 表面改質)

概要

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Scratch tests were carried out to examine the influence of gas pressure during ion bombarding on adhesive strength between CrN coatings and aluminum alloy using nitrogen and argon gas. The critical load clearly increased with increasing the nitrogen gas pressure. However, the influence of argon gas pressure on the critical load was small. As the results of AES analysis, ion bombardment in nitrogen gas generated Cr layer for low pressure and CrN layer for high pressure at the aluminum substrate surface and the thickness of the Cr and CrN layer increased with increasing the pressure. In contrast with this, ion bombardment in argon gas generated thinner Cr surface layer than that in nitrogen gas at the same pressure. The adhesive strength improved for thick CrN layer which was generated by ion bombardment in the high nitrogen pressure.
一般社団法人日本機械学会の論文
2007-09-07