Surface Passivation Effect of Silicon Substrates due to Quinhydrone/Ethanol Treatment(Semiconductors)
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2001-10-01
著者
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Sakata Isao
National Inst. Advanced Industrial Sci. And Technol. Ibaraki Jpn
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Sakata Isao
National Institute Of Advanced Industrial Science And Technology (aist)
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SHIMOKAWA Ryuichi
National Institute of Advanced Industrial Science and Technology
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TAKATO Hidetaka
National Institute of Advanced Industrial Science and Technology (AIST)
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Sakata Isao
Toyo-hakka Co. Ltd.
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Shimokawa R
National Inst. Advanced Industrial Sci. And Technol. Ibaraki Jpn
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Takato H
National Institute Of Advanced Industrial Science And Technology (aist)
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