円錐圧子押込みにおける基板効果を利用した薄膜材料の塑性特性同定法

概要

論文の詳細を見る
A new identification method with micro/nano-identation for plastic material parameters of film/substrate system is presented. The method is based on extensive finite element computation on, "soft film on hard substrate" cases indented with cone. The method also utilizes the substrate effect on load versus depth relation in the identation, this effect has often been regarded as undesirable. The computational results were expressed as a response surface in a material parameter space. Based on the surface, and employing experimentally obtained load versus depth relation, the plastic material parametes of the film are identified. A numerical example determined by this method for different plastic properties of film/substrate system is given.
一般社団法人日本機械学会の論文
2008-04-25