X-ray Photoelectron Spectroscopic Analysis of Joined Parts in Ultrasonic Joining of Ceramic Plates
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概要
- 論文の詳細を見る
In recent years, we have attempted ultrasonic ceramic joining for the purpose of extending the application field of ultrasonic joining. We attempted ultrasonic joining of silicon nitride (Si_3N_4) plates and alumina (Al_2O_3) plates. We joined these ceramic plates without using any adhesive material in the case where the plates were of the same material. The maximum joint strength was 33MPa for Si_3N_4 plates and 30MPa for Al_2O_3 plates. However, there color the changes on the surface of the joined parts. We surmised that the changes are significant for clarifying the joining processes; thus, we also measured the composition of the joined parts by X-ray photoelectron spectroscopy. In this paper, we show the X-ray spectroscopic data of the joined parts, and discuss the relationship between the process of the joining and the change of composition. [DOI: 10.1143/JJAP.41.3232]
- 社団法人応用物理学会の論文
- 2002-05-30
著者
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Watanabe Yuji
Department Of Electrical Engineering Faculty Of Engineering Tohoku University
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IIJIMA Mitsuo
Department of Electronics and Systems, Faculty of Engineering, Takushoku University
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KAWAKAMI Kazutoku
Seidensha Electronics Co., Ltd.
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Iijima Mitsuo
Department Of Electronics And Systems Faculty Of Engineering Takushoku University
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Kawakami Kazutoku
Seidensha Electronics Co. Ltd.
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Watanabe Yuji
Department Of Computational Science And Engineering Graduate School Of Engineering Nagoya University
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