空間周波数領域2点法に関する研究(第1報) : 2組の2点法を組合わせる場合の系統誤差の補正

概要

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The multi-probe scanning method has been researched widely for evaluating the profile of large size ultra precision specimens. Several data processing methods, such as inclination method, integration method and combination method, etc. have been developed using two or three-sensor measurement systems. In this paper, the spatial frequency domain 2-point method, which combines two data sets of 2-point method with different sensor intervals, is discussed. Firstly, the algorithm of the two sets of 2-point method is introduced without considering the systematic and random error. Then, the influence of the systematic error is analyzed and an accurate software calibration method of the systematic error is proposed in the presence of the systematic and random error simultaneously. The uncertainty of evaluated profile is also estimated quantitatively after calibration. Although the uncertainty is introduced by both the random error and the systematic error, it is shown that its result is only decided by the magnitude of the random error. Simulations are performed to confirm the theory analysis finally.
公益社団法人精密工学会の論文
2007-06-05