Soft Magnetic Properties of Nanocrystalline Fe-Cu-Nb-Si-B Thin Films and Multilayers

概要

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Structural and magnetic properties of Fe-Cu-Nb-Si-B thin films and multilayers produced by rf sputtering have been investigated. The thin films 1μm thick are of an amorphous phase in the as-deposited state and their annealed ones are of a crystallized bcc phase with fine grains of nanometer size. The crystallization behavior is similar to those of the melt-quenched ribbons with the same composition. The crystallized films possess a saturation magnetic flux density of 1.3 T higher than that of the ribbons and good soft magnetic properties. For improving magnetic permeability in the high frequency region, an attempt has been made to fabricate Fe-Cu-Nb-Si-B / SiO_2 multilayers. It has been found that an [Fe_<75.6>Cu_<0.8>Nb_<1.9>-Si_<13.2>B_<8.5> (5, 000Å) / SiO_2 (50Å)]_2 multilayer annealed at 500℃ for 1 h also consists of bcc fine crystallites and exhibits low coercivity of about 0.08 Oe and permeability as high as 7, 000 at 1 MHz. Furthermore, the field annealed multilayers exhibit much higher permeability of about 10, 200 at 1 MHz.
東北大学の論文
1992-03-25