109 免震半導体工場の総合的アクティブ微振動制御 : 内生微振動と外来微振動の制御-その1(免震構造3・計測システム,OS-12:耐震・免震・制振(1))

概要

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In order to achieve more perfect vibration-free environment in base-isolated semiconductor factories, a smart structure was tested for comprehensive active microvibration control in a base-isolated 2-story steel frame building model of a 5x3x4^H m external size and a 6,900 kg total mass which was supported by four multistage rubber bearings. In the building model, 20 piezoelectric actuators were attached to the columns and the beams, and four horizontal actuator units consisting of two piezoelectric actuators each and four vertical ones of the same type were installed between the bottom of the superstructure and the foundation. The controller was designed by a model-matching method. The tests showed that the smart structure could effectively control three-dimensional microvibrations generated in the building model and excited by external disturbances.
社団法人日本機械学会の論文
2004-09-27