ピエゾアクチュエータを用いたスマート構造による精密生産施設のアクティブ微振動制振

概要

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A smart structure was tested for active microvibration control of a 2-story steel frame building model of a 5×3×4^Hm outer size and a 2 500 kg total weight which was excited by ambient ground vibration. In the structure, piezoelectric actuators attached to the columns and the beams were used for the microvibration control by bending moment control of them. The controller was designed using the H^ ∞ control theory. The tests showed that the smart structure could effectively reduce the three-dimensional microvibration of the building model, and its applicability to floors and even entire buildings of semiconductor manufacturing factories having steel frame structures.
一般社団法人日本機械学会の論文
2000-07-25