Observation of Micro-Oxygen Precipitates in the Vicinity of the Oxidation-Induced Stacking Fault Ring and Their Effects on Thin Gate Oxide Breakdown : Semiconductors
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2001-12-01
著者
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Kim Young-hun
R & D Center Lg Siltron Inc.
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Yoo H‐d
R&d Center Lg Siltron Inc.
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Lee K‐s
Lg Siltron Inc. Kyungbuk Kor
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Kim Hyun-soo
韓国
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Kim Hyun-soo
Department Of Internal Medicine Chonnam National University Medical School
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Kim Hyun-soo
Optical Communication Devices Department Basic Research Laboratory Electronics And Telecommunication
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Kim Hyun-soo
Lg Siltron Inc.
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Lee Bo-young
R&d Center Lg Siltron Inc.
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Kim Y‐h
R & D Center Lg Siltron Inc.
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Hong Byung-sub
Hynix Semiconductor Inc.
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Pyi Seung-ho
Hynix Semiconductor Inc.
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LEE Ki-Sang
LG Siltron Inc.
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LEE Bo-Young
LG Siltron Inc.
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YOO Hak-Do
LG Siltron Inc.
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KOHI Chung-Geun
Hynix Semiconductor Inc.
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KIM Yil-Wook
Hynix Semiconductor Inc.
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