Direct Phase Measurement of the X-Ray Specular Reflection Using Modulation under the Bragg Condition : Instrumentation, Measurement, and Fabrication Technology
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概要
- 論文の詳細を見る
A method for determining the phase of the X-ray specular reflection using the intensity modulation caused by a Bragg reflection is proposed. The method was applied to a Si(001) single crystal covered with a layer of native oxide a few nanometers thick. Measurement of intensity along the 00 rod (specular reflection) under excitation of the 113 Bragg reflection was carried out in the so-called (+,-) parallel arrangement, and intensity modulation of the specular reflection was observed. The phase of the specular reflection from the layer of native oxide was directly determined from the experimentally obtained modulation profile.
- 社団法人応用物理学会の論文
- 2002-05-15
著者
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HIRANO Keiichi
Institute of Material Structure Science, KEK-PF, High Energy Accelerator Research Organization
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TAKAHASHI Toshio
The Institute for Solid State Physics, The University of Tokyo
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Yashiro W
National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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Hirano Keiichi
Institute Of Materials Structure Science High Energy Accelerator Research Organization
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Yashiro Wataru
The Institute For Solid State Physics The University Of Tokyo
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SHIMIZU Keisuke
The Institute for Solid State Physics, The University of Tokyo
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Shimizu Keisuke
The Institute For Solid State Physics The University Of Tokyo
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Takahashi Toshio
The Institute For Solid State Physics The University Of Tokyo
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