Field-Ion Microscopic Observation of Surface Silicide Formation and Substrate Metal Interfaces
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概要
- 論文の詳細を見る
Surface silicide formation and semiconductor-metal intermixing phenomena have been investigated using atomic capability field-emission and field-ion microscopy(FEM-FIM). When silicon is vapor-deposited onto a tungsten tip surface at low temperature(50K), interfacial reactions between silicon and tungsten atoms do not occur, and silicon adatoms on the W{001}plane assume a special pseudomorphic structure. Initial silicide reactions are particularly favorable on and around W{001}, W{111}and W{112}planes. The work function for the various silicide reaction stages and for various coverages was also evaluated. The silicide layers which cover the entire W tip surface were observed after a few hundred layers of silicon were vapor-deposited and thermally heated to around 950K. A region in which the atomic structure of the substrate tungsten is invisible appears locally due to preferential hydrogen diffusion in the tungsten matrix. This phenomenon was observed specifically on and around the W{111}plane and in a mismatch zone which appears because of the epitaxial growth of silicide layers from the W{001}plane. This result indicates that the depth of silicide formation varies locally over several atomic layers of the tungsten substrate.
- 社団法人応用物理学会の論文
- 2000-07-15
著者
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Tanaka Hiroaki
Department Of Cardiovascular Medicine Tottori University Fuculty Of Medicine
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Tanaka Hiroaki
Department Of Electric Electronics And Computer Science Technology Nagasaki Institute Of Applied Sci
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OKUNO Kimio
Department of Electric, Electronics and Computer Science Technology, Nagasaki Institute of Applied S
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Tanaka Hiroaki
Department Of Biology Aichi University Of Education
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Okuno Kimio
Department Of Electric Electronics And Computer Science Technology Nagasaki Institute Of Applied Sci
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Okuno Kimio
Department of Electric and Electronics Engineering, Nagasaki Institute of Applied Science, Nagasaki 851-0119, Japan
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